| 摘要 |
PROBLEM TO BE SOLVED: To enable, in an optical scanning mechanism equipped with two scanning mirrors and an optical element for causing the two scanning mirrors to form images successively via intermediate image formation, both scanning mirrors to operate at sufficiently large deflection angles with sufficiently high positioning accuracy and at sufficiently high positioning velocity.SOLUTION: An optical scanning mechanism has a control unit that either indicates to two scanning mirrors (1 and 2) deflection angles in a range from 0 to the largest possible deflection angle or supplies a drive device linked to the scanning mirrors (1 and 2) with an excitation voltage or an excitation current. At least one of the scanning mirrors (1 and 2) is formed for biaxial scanning, and the control unit is so configured, regarding quasi-static or resonant, in whichever way chosen, biaxial or uniaxial deflection of a light ray flux (3), as to vary the control of the two scanning mirrors (1 and 2). Preferably, at least one of the scanning mirrors (1 and 2) should be configured as a MEMS subassembly.SELECTED DRAWING: Figure 1 |
