| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor device having a simple structure, easily manufactured, with high reliability and accuracy for sensing acceleration. SOLUTION: The acceleration sensor device 9 comprises: a capacitance electrode 2 in which a plurality of electrodes 2a, 2b are arrayed in a row and vertically face each other through a space 1; elastic members 4 disposed from both ends toward the center in the space 1; and a dielectric block 3 accommodated between the elastic members 4 in the space 1. Since the dielectric block 3 rests in a position in which an inertial force corresponding to the acceleration and a stress due to an action from the elastic members 4 are balanced and an electrostatic capacitance is varied between the capacitance electrode 2(2a, 2b), the acceleration can be easily calculated and sensed by previously measuring the stress due to a deformation of the elastic members 4 based on the position and the mass of the dielectric block 3. COPYRIGHT: (C)2009,JPO&INPIT
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