STEAM CIRCULATION REGENERATION SYSTEM

摘要

Provided is a steam circulation regeneration system which is used by circulating and regenerating steam. This steam circulation regeneration system includes at least: a liquefying regeneration device 3 which has a liquefying space for liquefying steam of a heated object and a heating unit for maintaining the liquid form; a vaporization device 5 which heats the liquid with a heating unit and generates steam; a communicating portion 40 which communicates the liquefying regeneration device and the vaporization device; a processing device 9 which processes an object to be processed using the steam; a return pipe 11 which returns the steam used in the processing device to the liquefying regeneration device; a liquefying regeneration temperature control unit which controls the temperature of the liquefying regeneration device; and a vaporization temperature control unit which controls the temperature of the vaporization device. The heated object is in solid state at normal temperature, steam and liquid state in the liquefying regeneration device, liquid state in the communicating portion, liquid and steam state in the vaporization device, and steam state in the processing device and the return pipe.