| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet head which enables reduction of manufacturing costs by enhancing a yield of a chip for the head as a good article, and fully securing its absolute number. SOLUTION: The manufacturing method for the inkjet head equipped with pressure chambers 2 which store ink, nozzles formed in the pressure chambers 2 for ejecting the ink, and actuators 4 for ejecting the ink in the pressure chambers 2 from the nozzles by changing an internal pressure of the pressure chambers 2 includes a process of manufacturing an upper structure 6 by forming the actuators 4 on a substrate by using a liquid phase method or vapor phase method, a process of separating the upper structure 6 from the substrate, a process of forming a lower structure 5 with the pressure chambers 2 separately from the substrate, and a process of joining the upper structure 6 and lower structure 5 to each other. COPYRIGHT: (C)2007,JPO&INPIT |
