| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bearing structure of a vacuum pump in which a rotor can be favorably supported by an emergency bearing, and a vacuum pump using it. <P>SOLUTION: A turbo molecular pump (a vacuum pump) consists of a rotor, a housing 3 for accommodating the rotor, a magnetic bearing for supporting the rotor so as to be rotatable to the housing 3, an emergency bearing 5 which is supported in the housing 3 and which rotatably supports the rotor with respect to the housing 3 during a functional stop of the magnetic bearing and a drive unit such as an electric motor for rotatively driving the rotor around an axial line. A recess 3c for accommodating the outer ring 12 of the emergency bearing 5 is provided to the inner peripheral surface 3b of a portion receiving the emergency bearing 5 in the housing 3. A heat resistant heat insulating material 16 is provided between the inner surface of the recess 3c and the outer peripheral surface of the outer ring 12, and composed of a SUS made sheet arranged in a space between the lower surface of the outer ring 12 and the inner surface of the recess 3c. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
