| 摘要 |
<p>The present invention provides a method for producing a high-density multi-layer ceramic substrate (1) with stable characteristics, the substrate (1) incorporating therein a passive component (10, 11) such as a high-precision capacitor or inductor. The method comprises the steps of providing compact blocks containing a green ceramic functional material to form passive components (10, 11); providing a composite green laminate which contains a ceramic green sheet having a plurality of ceramic green sheets comprising a ceramic insulating material and in which the compact blocks are built in pre-disposed spaces and a paste containing a metal inducing, during firing, oxidation reaction accompanied by expansion is provided in space between inside walls of the spaces and the compact blocks; firing the composite green laminate in a state in which the laminate is sandwiched by the sheet-like supports formed of green ceramics that cannot be sintered at the sintering temperature, so as to prevent shrinkage of the laminate; and removing the unsintered sheet-like supports. <IMAGE></p> |
