| 摘要 |
PROBLEM TO BE SOLVED: To surely prevent an inferiority of delivering such as clogging caused by foreign substances from occurring, to improve yield and reliability and to decrease cost. SOLUTION: A method for manufacturing a liquid jetting head comprises the process of forming an insulating film 53 so as to seal a through-hole part 51, the process of forming a piezoelectric element on a flow path forming substrate and forming a separating layer 190 on the insulating film 53 to form a projecting part 191, the process of joining a reservoir forming substrate 30 to the flow path forming substrate, the process of forming a pressure generating room and a communicating part 13 by performing wet etching of the flow path forming substrate and exposing the insulating film 53 to expose the projecting part 191, the process of removing the insulating film 53 exposed on the communicating part 13 side, the process of forming a protective film 16 comprising a liquid-resistant material on the pressure generating room of the flow path forming substrate, the inner face of the communicating part 13 and the separating layer 190, the process of releasing and removing the protective film 16 on the separating layer 190, and the process of communicating with the reservoir part 31 and the communicating part 13 by removing the separating layer 190. COPYRIGHT: (C)2008,JPO&INPIT
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