| 发明名称 |
METHOD FOR FORMING PATTERN, AND TEMPLATE |
| 摘要 |
According to an aspect of the present invention, there is provided a template including: a template substrate; patterns for forming device patterns on a wafer substrate; and a charging monitoring pattern, a size of the charging monitoring pattern being equal to a largest pattern in the patterns for forming the device patterns.
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| 申请公布号 |
US2010022036(A1) |
申请公布日期 |
2010.01.28 |
| 申请号 |
US20080179804 |
申请日期 |
2008.07.25 |
| 申请人 |
YONEDA IKUO;OTA TAKUMI;KOSHIBA TAKESHI |
发明人 |
YONEDA IKUO;OTA TAKUMI;KOSHIBA TAKESHI |
| 分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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