发明名称 |
Method for making a nanotube-based electrical connection between two facing surfaces |
摘要 |
Facing surfaces made from semiconductor material are formed and then transformed into a porous semiconductor. The porous semiconductor is then transformed into a porous metallic material by silicidation. The porous metallic material then acts as catalyst for growth of the carbon nanotubes which electrically connect the facing surfaces made from porous metallic material.
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申请公布号 |
US2010022082(A1) |
申请公布日期 |
2010.01.28 |
申请号 |
US20080314815 |
申请日期 |
2008.12.17 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
LOUIS DIDIER |
分类号 |
H01L21/768 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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