发明名称 Method for making a nanotube-based electrical connection between two facing surfaces
摘要 Facing surfaces made from semiconductor material are formed and then transformed into a porous semiconductor. The porous semiconductor is then transformed into a porous metallic material by silicidation. The porous metallic material then acts as catalyst for growth of the carbon nanotubes which electrically connect the facing surfaces made from porous metallic material.
申请公布号 US2010022082(A1) 申请公布日期 2010.01.28
申请号 US20080314815 申请日期 2008.12.17
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 LOUIS DIDIER
分类号 H01L21/768 主分类号 H01L21/768
代理机构 代理人
主权项
地址