| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of carrying out a good film forming independently of a relationship of properties of the film forming surface and properties of a liquid material when carrying out film forming using a liquid process. SOLUTION: The thin-film forming method is carried out by using the liquid material containing a solute to be changed to a thin film and a solvent for dissolving or dispersing it, wherein the method consists of the first step for lowering a temperature at least near the film forming surface of an objective material (10) to the solidifying temperature of the liquid material or below, the second step for dropping the liquid material (12) on the film forming surface of the objective material, the third step for making the liquid material solidify at the time that the liquid material reaches on the film forming surface of the objective material, and the fourth step for removing the solvent (16) from the solidified liquid material. COPYRIGHT: (C)2006,JPO&NCIPI
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