发明名称 Wire structure and semiconductor device comprising the the wire structure
摘要 Provided are a wire structure and a semiconductor device having the wire structure. The wire structure includes a first wire that has a first region having a width of several to tens of nanometers and a second region having a width wider than that of the first region.
申请公布号 US2008169118(A1) 申请公布日期 2008.07.17
申请号 US20070005364 申请日期 2007.12.27
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 CHOI SANG-JUN;LEE JUNG-HYUN;BAE HYUNG-JIN;LEE CHANG-SOO
分类号 H01L27/108;H01B5/00 主分类号 H01L27/108
代理机构 代理人
主权项
地址