| 摘要 |
PROBLEM TO BE SOLVED: To enhance the temperature conditioning performance of temperature conditioning liquid when a substrate is processed by supplying process liquid to a first surface of the substrate while supplying temperature conditioning liquid to a second surface of the substrate.SOLUTION: A substrate processing device includes: a substrate holding part (10); a process liquid nozzle (44) which supplies process liquid to a first surface of a substrate (W) having a pattern formed thereon; and a temperature conditioning liquid nozzle (54A) which supplies a mixed liquid obtained by mixing pure water with an organic solvent which is miscible with the pure water and whose surface tension is lower than the pure water to a second surface on the side opposite to the first surface of the substrate as a temperature conditioning liquid. |
