| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide element in which low loss is realized, and to provide its manufacturing method, in which the occurrence of reduction in yield is prevented, in order to expand the application range of the optical waveguide element in which a plurality of wavelength multiplexers that are formed on a substrate, using glass or a polymer as the material, a rounding arrayed waveguide grating (AWG), a plurality of wavelength demultiplexers and wiring waveguides are integrated and a wavelength router function is provided. SOLUTION: In the optical waveguide element, the plurality of wavelength multiplexers 28, 29, 30 and 31 which are formed on an Si substrate 92 using a polymer as the material, a rounding AWG33, the plurality of wavelength demultiplexers 35, 36, 37 and 38 and wiring waveguides are integrated and a wavelength router function are provided. The plurality of wavelength multiplexers, the rounding AWG, the plurality of wavelength demultiplexers and wiring waveguides are manufactured individually, positioning pin inserting holes are made on the substrate, positioning pins are mounted on the holes, and thereafter these optical parts are assembled to form the optical waveguide element. COPYRIGHT: (C)2005,JPO&NCIPI |
