发明名称 GANTRY POSITIONING SYSTEM
摘要 <p>A gantry system is provided that comprises a gantry beam having a first section and a second section and first and second motors cooperating to drive the respective first and second sections in parallel directions to position the gantry beam along a linear axis. A flexure is connected between the first and second sections about which the second section is deflectable relative to the first section, which is advantageous to reduce any stresses that may be caused in the gantry system when driving the gantry beam.</p>
申请公布号 SG134280(A1) 申请公布日期 2007.08.29
申请号 SG20070005192 申请日期 2007.01.23
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 AJIT GAUNEKAR;PETER WIDDOWSON GARY
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