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发明名称
TRANSFER ROBOT
摘要
본 발명은 반송 로봇을 제공한다. 본 발명의 일 예에 의한 반송 로봇은, 기판을 위치시키는 핸드와; 상기 핸드의 일단과 결합하여 상기 핸드를 이동시키는 구동축과; 상기 구동축과 상기 핸드를 연결하는 아암과; 상기 구동축을 구동하는 구동부를 포함하되; 상기 핸드는, 서로 다른 열팽창 계수를 가지는 복수의 플레이트가 상하방향으로 적층되도록 제공된다.
申请公布号
KR101681192(B1)
申请公布日期
2016.12.01
申请号
KR20150155241
申请日期
2015.11.05
申请人
세메스 주식회사
发明人
이봉문
分类号
H01L21/677
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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