| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tuning-fork-type angular velocity sensor capable of individually adjusting vibration characteristics of a plurality of vibrating arms and provide its manufacturing method. <P>SOLUTION: With vibrations of other arm parts 12B except an arm part 12A to be adjusted mechanically restrained, vibration characteristics of the arm parts 12A and 12B are adjusted. In this state, coupled vibrations are not generated between the arm parts 12A and 12B, and the arm part 12A to be adjusted vibrates in a form of natural vibrations according to its external shape, piezoelectric characteristics, etc. It is thereby possible to individually adjust vibration characteristics such as a vibrating direction, a resonance frequency, etc. of the arm part 12A. Since it is possible to highly accurately adjust vibration characteristics of each of the arm parts 12A and 12B, it is possible to manufacture angular velocity sensors provided with a vibrator having expected vibration characteristics. <P>COPYRIGHT: (C)2008,JPO&INPIT |
