| 摘要 |
PROBLEM TO BE SOLVED: To provided an electron microscope quickly switching a monochromator while suppressing deterioration of acquisition data without reducing reliability. SOLUTION: Since a switching operation of the monochromator 12 is carried out only by output voltage adjustment of a drive voltage source 36 and a switching operation of a 3 terminal switch 41 without repeating an switching operation of a power supply, the sure and reliable switching operation of the monochromator 12 can be performed without setting a time for stabilizing an output voltage accompanying the switching operation of the power supply. COPYRIGHT: (C)2007,JPO&INPIT
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