| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable control and display accurately reflecting a lighting status of plasma in a plasma generator used for workpiece processor such as reforming of a substrate. <P>SOLUTION: Approaching to a tip of a plasma generating nozzle 31, an end of an optical fiber 38 is attached and separately arranged from the plasma generating nozzle 31, photoelectric conversion of captured light is processed at a sensor input part 98 covered with a shield chassis 981 and output to a whole control part 90. Therefore, weak voltage and/or current obtained by the photoelectric conversion is hardly affected by microwave noise, and accurately converted into output for control or display, control and display accurately reflecting a lighting status of plasma can be provided, so that a stable plume can be obtained. And also, since the photoelectric conversion means hardly exists around the nozzles, the irradiated object is made closer to a protection tube 36, and plasma with high density can be irradiated. <P>COPYRIGHT: (C)2007,JPO&INPIT |
