| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity type ultrasonic transducer, an ultrasonic probe and an ultrasonic diagnostic device, having an excellent characteristic without causing a pull-in effect. SOLUTION: The electrostatic capacity type ultrasonic transducer is configured to comprise: a pair of electrodes arranged opposite to each other; and a vibration film supporting one electrode of the pair of electrodes. The electrostatic capacity type ultrasonic transducer further comprises: an n gap layers (n is a natural number of 1 or more) interposed between the pair of electrodes; and an m insulating layers (m is a natural number of 1 or more) interposed between the pair of electrodes, and is configured to satisfy the following formula: d<SB>1</SB>≤(Σd<SB>n</SB>+Σt<SB>m</SB>/k<SB>m</SB>)/3, wherein d<SB>n</SB>is a thickness of the n-th gap layer, particularly, d<SB>1</SB>is a thickness of the gap layer for vibrating the vibration film, t<SB>m</SB>is a thickness of the m-th insulating layer, and k<SB>m</SB>is a dielectric constant of the m-th insulating layer. COPYRIGHT: (C)2008,JPO&INPIT |
