摘要 |
A protection diode includes a semiconductor substrate; a gate side well region of a first conductivity type in the semiconductor substrate; a grounding side well region of the first conductivity type in the semiconductor substrate and joined to the gate side well region; a gate side diffusion region of a second conductivity type in the semiconductor substrate and joined to the gate side well region; a grounding side diffusion region of the second conductivity type in the semiconductor substrate, separated from the gate side diffusion region, and joined to the grounding side well region; a gate side electrode connected between a gate of a transistor and the gate side diffusion region; and a grounding electrode connected to the grounding side diffusion region. Dopant impurity concentration in the grounding side well region is lower than dopant impurity concentration in the gate side well region. |