| 摘要 |
PROBLEM TO BE SOLVED: To provide an airtight leakage inspection method and a device capable of performing leakage inspection of a product accurately and stably, preventing the occurrence of wrong determination, stabilizing an inspection condition, and performing efficient inspection. SOLUTION: Moisture in the air in a vacuum chamber 2 is measured, and when a moisture amount measured value is lower than or equal to a proper value, leakage inspection is executed as it is, and the measured value is higher than the proper value, such measures are taken as increase of the rotational frequency of a vacuum pump 3, elongation of an exhaust time, enclosure of dry air or heated dry air, or preheating of a next inspection product, to thereby control so that a background at the inspection time becomes constant. COPYRIGHT: (C)2007,JPO&INPIT
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