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发明名称
MANUFACTURE FOR SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPS5293283(A)
申请公布日期
1977.08.05
申请号
JP19760010145
申请日期
1976.02.02
申请人
NIPPON ELECTRIC CO
发明人
OONO YASUO
分类号
H01L23/52;H01L21/28;H01L21/3205
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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