Tuning fork resonator with low mfg. cost - where one prong of nickel-iron alloy fork is coated with piezoelectric material which is covered by metal electrode layer

摘要

The resonator possesses a tuning fork which is made of non-piezoelectric material, and which can be excited electrically. At least one of the prongs of the fork is coated with a layer (2) of piezoelectric material forming a transducer; and layer (2) is covered by an electrode layer (3). Layer (2) is pref. deposited by cathodic sputtering, and consists esp. of lead-zirconate-titanate; lithium tantalate; lithium niobate; cadmium sulphide; or ZnO. The tuning fork is pref. made of conducting material, and forms one electrode for layer (2); the fork is made esp. of a material with high acoustic quality and a low temp. coefft. of frequency, partic. a nickel-iron alloy. Electrode (3) is pref. deposited by sputtering or evapn.; and the resonator is pref. mounted on its electric leads in a housing.