ELECTROSTATIC CHUCK,申请号KR20150038177-传众专利搜索

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发明名称	ELECTROSTATIC CHUCK
摘要	본 발명의 일 실시예는 정전척에 관한 것으로, 해결하고자 하는 기술적 과제는 경량이며, 처짐 현상이 작은 8세대용 디스플레이를 위한 정전척을 제공하는데 있다. 이를 위해 본 발명은 제1면과 상기 제1면의 반대면인 제2면을 갖는 알루미늄 재질의 베이스 기판; 상기 베이스 기판의 제1면에 코팅된 세라믹 재질의 절연층; 및 상기 베이스 기판의 제2면에 형성된 알루미늄 재질의 처짐 방지 구조물을 포함하는 정전척을 제공한다.
申请公布号	KR101661640(B1)	申请公布日期	2016.09.30
申请号	KR20150038177	申请日期	2015.03.19
申请人	아이원스 주식회사	发明人	박재혁;최병창;심영환;김병기
分类号	H01L51/56;H01L21/683	主分类号	H01L51/56
代理机构		代理人
主权项
地址

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