| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of measuring in-plane load distribution using a simple structure without using a complicated sensor.SOLUTION: The pressure sensor according to one embodiment of the disclosure includes: a first pressure sensitive element which includes: a first conductivity layer with plural first projections having the conductivity; plural first wiring layers; and a first dielectric layer formed between the plural first projections and the plural first wiring layers; and a second pressure sensitive element which includes: a second conductivity layer with plural second projections having the conductivity; plural second wiring layers; and a second dielectric layer formed between the plural second projections and the plural second wiring layers. The first pressure sensitive element and the second pressure sensitive element are laminated with each other.SELECTED DRAWING: Figure 1 |
