发明名称 |
Stripping compositions and methods of stripping resists |
摘要 |
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a tetrahydrothiophene 1,1-dioxide compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
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申请公布号 |
US4395479(A) |
申请公布日期 |
1983.07.26 |
申请号 |
US19820408051 |
申请日期 |
1982.08.17 |
申请人 |
J. T. BAKER CHEMICAL COMPANY |
发明人 |
WARD, IRL E.;HALLQUIST, LISA G.;HURLEY, THOMAS J. |
分类号 |
B41C1/00;G03F7/42;(IPC1-7):B01F1/00;B08B7/00;G03C5/00 |
主分类号 |
B41C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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