| 摘要 |
PURPOSE:To enable simultaneous measurement of displacement with respect to changes in the temperature of a heat responsive element and vibration state thereof in the same optical system, by providing a displacement measuring section for measuring the displacement characteristic of the temperature of the element and a vibration measuring section for measuring vibration characteristic. CONSTITUTION:A parallel light from a projection section 1 irradiates a heat-responsive element fixed in a temperature setting section 2 set a desired ambient temperature and then, reaches a projection optical section 3, which has a function of setting a projection image of the heat-responsive element at a desired size and sets the size of the projection image according to an object to be measured. Then, the projection image from the projection optical section 3 is divided into two, a part of which is introduced into a displacement measuring section 4 for measuring normal temperature displacement characteristic while the other thereof is introduced into a vibration measuring section for measuring vibration characteristic at the snap action to be converted into respective signals. The displacement signal from the displacement measuring section 4 and the vibration signal from the vibration measuring section 5 are introduced to a processing section 6 for arithmetic processing and the resulting temperature displacement characteristic and vibration characteristic are outputted and shown on a display section 7. |
