| 摘要 |
PURPOSE:To attain easily fine adjustment of a rotary substrate in keeping it in the horizontal state by providing a cam mechanism over the stator yoke of a motor and the rotatory substrate, and making the rotatory substrate rotatable horizontally. CONSTITUTION:A rotor 4 fixed to a shaft 5 is interposed between upper and lower stator yokes 1 and 2, and an eccentric cam 6 is mounted to the rotational substrate 3 from the side of the lower stator yoke 2. As the cam 6 is turned in the direction C by a tool 7, the substrate 3 is turned with rotation of the cam 6 by centering the shaft in the direction of A to make considerably fine horizontal adjustment easy without any addition.
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