| 摘要 |
PURPOSE:To make large current operation for hours performable, by constituting a grid device available for an ion gun to be windable in a way of attaching a grid member having a reticulate opening to a holding plate provided with two winding cores. CONSTITUTION:A single grid device available for an ion gun of an ion beam spatter or the like is formed with a grid holding plate 14 having the hole 14a made so as to pattern a grid form and attaching both winding cores 15 and 16 to bearing parts 14b-14e at both ends, and a long size grid member 17 being machined into a reticulate form at a fixed aperture rate. And, it is locked in front of an ion gun 8 via an insulator, making a plasmatic ion pass through there. And, when the grid member 17 becomes unusable, the winding core 15 is rotated and the flawless grid member 17 is adjoined into the hole 14a. Therefore, use for hours as making a large current flowing is made attainable, thus operating time improvable.
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