DEVICE FOR IRRADIATING METALLIC ION BEAM

摘要

PURPOSE:To prevent diffusion of irradiated metallic ion beams by providing a means forming an electron sheath having high electron velocity around the metallic ion beams joining to electron beams. CONSTITUTION:Metallic ion beams 20 of silver or the like generated from the surface of an electrode 12 are deflected by a deflecting electrode 18 after the variance of initial velocity thereof is corrected by a velocity regulating part 16. Furthermore the metallic ion beams 20 are subjected to focus control by a focus controlling electrode 19 and led to an electron beam feed part 24 and joined to electron beams 21 projected from an electron gun 26 and thereby mutual repulsion force of metallic ions 20 is reduced. The metallic ion beams 20 joined to the electron beams 21 are led to an electron sheath forming part 28 and irradiated on the surface of a base plate 22 in a state surrounded by an electron sheath 30 having the higher electron velocity than the electron beams 21. Thereby the metallic ion beams 20 can be irradiated on a material to be irradiated without being diffused and a printed circuit plate or the like having a high-density pattern can be highly precisely formed.