| 摘要 |
PURPOSE:To suppress lowly a variance of a heater resistance, and to always obtain a correct gas sensitive characteristic by embedding a heater formed in advance into an insulating substrate, providing an insulating layer thereon, and providing a pair of electrodes and a gas sensitive body on its insulating layer. CONSTITUTION:By raising its dimension accuracy, a variance of a resistance value of the heater 15 formed in advance, can be suppressed lowly. In such a way, stabilization of a heating temperature of an insulating substrate can be contrived, and accordingly, a correct gas sensitive characteristic can always be obtained, and a correct gas detection can be executed. Also, since the heater 15 is formed so as to be embedded into a bottom plate 14a of the insulating substrate, the disconnection due to thermal expansion, the disconnection due to corrosion, and also, a heater detachment, etc. can be prevented, the durability also goes to excellent, and the reliability can be improved.
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