| 摘要 |
PURPOSE:To suppress the influence of the heat generated by the combustion of hydrogen and oxygen on the temperature atmosphere in a processing tube by a method wherein a heat-retaining heater part is provided adjoining to the heat-insulated part at the entrance of a furnace, and hydrogen and oxygen are burned in this region. CONSTITUTION:Heater wires 11a and 11a are embedded in the heat-insulating moldings 10a located adjoining to a heat-insulated part at the opening of a furnace, a heat-retaining heater part 2, with which temperature is controlled at a fixed temperature, namely, the ignition point of about 580 deg.C or above, is provided adjoining to a heat-insulated part at the entrance of a furnace. Temperature is controlled by providing the heat-insulating moldings 10a at the part adjoining to the rear of the furnace entrance heat-insulating part 3, the non-uniformity of the temperature atmosphere in a processing tube 4 can be suppressed to the minimum by burning hydrogen and oxygen inside the heat-insulating molded bodies, and the temperature variation of the zone III can be reduced. As a result, the stability of the temperature when hydrogen and oxygen are burned in a heat-treatment furnace can be improved, and the control of temperature can also be made easy.
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