| 摘要 |
PROBLEM TO BE SOLVED: To measure the height of a minute shaped part with greater accuracy in a surface level difference measurement method and surface level difference measurement device using white light interferometry or in a method for manufacturing a liquid crystal display device.SOLUTION: Provided is a surface level difference measurement method using white light interferometry, wherein two shape data obtained from a measurement area a1 in the vicinity of a minute shaped part PS and a measurement area a2 that includes areas adjacent to the measurement area a1 are synthesized, with shape data about the measurement area a2 that is based on the shape data of the measurement area a1 adopted with regard to the vicinity of a columnar spacer PS, and the height of the minute shaped part PS is derived from the synthesized shape data.SELECTED DRAWING: Figure 1 |
