| 摘要 |
PURPOSE:To offer the pattern matching device for executing correctly pattern matching with regard to the pattern matching device for deriving a position of a master pattern. CONSTITUTION:A matching deciding part 11 compares a master pattern and an image pickup pattern, and derives a position in which the number of unmatching between each dot of both the patterns is the smallest. A matching degree calculating means 12 calculates separately the degree of matching of a black dot and the degree of matching of a white dot of both the patterns, respectively, in a position in which the number of unmatching between each dot of both patterns is smallest. A matching degree calculating means 13 calculates the degree of pattern matching, based on both the degrees of matching of the black dot and the white dot. |
