| 摘要 |
<p>PURPOSE:To provide an apparatus for removing from the waste liq. of semiconductor washing a low concn. alcoholic organic matter dissolved therein stably, efficiently and on a large scale. CONSTITUTION:The removing apparatus is provided with a bactericidal device 2 for the waste liq. of semiconductor washing, a microbiological nutritive agent feeding device, a microbiological treatment reacting tank 4 contg. the filling material having supported thereon the microorganisms for removing TOC from the waste liq. to be treated, a device 9 for feeding aeration gas to aerate the waste liq. of the semiconductor washing and a discharge pipe for discharging the waste liq. from the microbiological treatment reacting tank to the outside. The microbiological treatment reacting tank contains the aforesaid filling material with a space defined at its upper part and consists of a water collecting lateral pipe 4a which allows the waste liq. and the aeration gas to flow from the upper surface of the filling material 100-200mm downwards to form blockings for the filling material around the branch pipes so as to make a contribution to fixation of the filling layer and which discharges there- through the aeration gas and microbiologically treated liq. to outside the microbiological treatment reacting tank.</p> |
