| 摘要 |
<p>PURPOSE:To provide a wafer transfer apparatus which is able to switch its wafer contacting spots in a short time without manual work. CONSTITUTION:A wafer transfer apparatus is equipped with a first support arm 1 possessed of wafer contacting spots 5 which support the underside of a wafer on the upside of its tip and a tapered plane 7 on its upside and a second support arm 2 possessed of wafer contacting spots 6 not level with the wafer contacting spots 5 on the upside of its tip and a tapered plane 8 on its underside are provided. The first support arm 1 and the second support arm 2 are so jointed together as to be capable of sliding relatively and freely in the arm extending direction of X bringing the tapered planes 7 and 8 into contact with each other.</p> |
