| 发明名称 |
METHOD AND APPARATUS FOR FABRICATING SELF-ASSEMBLING MICROSTRUCTURES |
| 摘要 |
A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region. |
| 申请公布号 |
CA2177219(A1) |
申请公布日期 |
1996.12.08 |
| 申请号 |
CA19962177219 |
申请日期 |
1996.05.23 |
| 申请人 |
REGENTS OF THE UNIVERSITY OF CALIFORNIA (THE) |
发明人 |
SMITH, JOHN STEPHEN;YEH, HSI-JEN J. |
| 分类号 |
H01L21/302;B65G49/02;G02F1/136;G02F1/1362;G02F1/1368;H01L21/02;H01L21/20;H01L21/306;H01L21/3065;H01L21/50;H01L21/52;H01L21/58;H01L21/677;H01L21/68;H01L21/78;H01L21/98;H01L23/13;H01L23/14;H01L25/04;H01L25/065;H01L25/075;H01L25/16;H01L27/12;H01L29/06;H01L29/88;H01L31/10;H01L33/20;H01S5/00;H01S5/022;H01S5/40 |
主分类号 |
H01L21/302 |
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