| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate holding member which enables a substrate holding member which is adaptable to a substrate to be selected when the substrate is changed by change of exposure conditions. SOLUTION: A substrate holding member 20 which holds a photosensitive substrate W can be attached and detached to and from a substrate table 18 which moves inside a standard plane and has an information storage part 20A wherein at least readable various information is stored. According to this constitution, information such as a kind of a substrate holding member and property of an adaptable substrate are stored in the part 20A in advance and the information is read. Thereby, it is possible to identify a kind, etc., of the substrate holding member 20 and to select and change the adaptable member 20 even if exposure conditions are changed.</p> |
