发明名称 APPARATUS FOR PRODUCTION OF ZINC OXIDE THIN FILM, PRODUCTION THEREFOR AND PRODUCTION OF PHOTOVOLTAIC POWER ELEMENT BY USING THE SAME
摘要 PROBLEM TO BE SOLVED: To prevent the adhesion of a zinc oxide thin film on the rear surface of a long-sized conductive substrate and the deviation of the long-sized substrate from a transportation system by transporting the substrate and supplying a current between an electrode immersed into an aq. soln. contg. nitric acid ions and zinc ions and the substrate while bringing the electrode and the one surface of the substrate likewise immersed in the soln. into contact with a rotary belt. SOLUTION: For example, a corrosion resistant soln. tank 101 is filled with an aq. zinc nitrate soln. 102 of a prescribed concn. and the aq. soln. 102 is circulated by a circulating pump 109 and is held constantly at a prescribed temp. by a heater 107 connected to a power source 108 for the heater. Next, the long-sized conductive substrate 103 is installed at a substrate delivery roller 10 and a substrate take-up roller 111 through the rotary belt and the counter electrode 104 is installed. As a result, the one surface (rear surface is the surface formed with the zinc oxide thin film is defined as a front surface) of the long-sized conductive substrate 103 is coated with the belt and, therefore, the deposition of the thin-film on the rear surface may be prevented without attaching an insulation sheet for preventing the growth of the thin film on the rear surface.
申请公布号 JPH10259496(A) 申请公布日期 1998.09.29
申请号 JP19980005762 申请日期 1998.01.14
申请人 CANON INC 发明人 NAKAMURA TETSUO
分类号 B65G15/58;B65G49/02;B65H23/30;C25D9/08;H01L31/04 主分类号 B65G15/58
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