| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an analyzing device, which can perform two-dimensional image pick-up by electrons and ions or the like and the detailed analysis of physical quantity at the predetermined position at the same time with high sensitivity, high S/N ratio and high resolution, and of which maintenance is facilitated. SOLUTION: A device is formed of an image pick-up means having a solid-state image pick-up element (CCD) 31 for picking up a two-dimensional image of electrons or the like radiated from a workpiece 2 and provided with an opening at the nearly central part thereof, an image forming means arranged between the image pick-up element 31 and the workpiece 2 and formed of an accelerating electrode 43 for accelerating the electrons or the like so as to let them collide with an image receiver surface of the image pick-up element 31, an electronic optical system 47 for decelerating the electrons passed through the opening 34, an analyzing means 54 such as a hemi- spherical energy analyzer for measuring the energy quantity of the photoelectrons passed through the electronic optical system 47, and a display means provided with a monitor 62 for displaying the secondary image of the electron and the analysis data on the basis of the image signal output from the image pick-up means and the analysis data signal output from the analyzing means 54.</p> |
