ANGULAR VELOCITY SENSOR AND PROCESS FOR MANUFACTURING THE SAME

摘要

An integral bimorph angular rate sensor is formed by directly bonding two tuning fork members in the thickness direction to enhance the detecting sensitivity of the angular velocity sensor. The individual tuning fork members are formed from a single crystalline piezoelectric material such as quartz and are bonded in the crystal axis direction as to establish a piezoelectric phenomenon wherein the piezoelectric materials of the bonded tuning fork members have inverse polarities in their width or thickness directions.