PRODUCTION OF SUBSTRATE WITH TRANSPARENT ELECTRICALLY CONDUCTIVE FILM, SUBSTRATE WITH TRANSPARENT ELECTRICALLY CONDUCTIVE FILM AND LIQUID CRYSTAL DISPLAYING ELEMENT

摘要

PROBLEM TO BE SOLVED: To coat the surface of an organic substance such as a color filter or the like for liq. crystal display with an ITO transparent electrically conductive film good in adhesion and small in specific resistance. SOLUTION: In the method for producing a substrate 20 with an ITO transparent electrically conductive film in which an indium oxide vapor depositing material contg. tin oxide is irradiated with arc discharge plasma, and the vapor depositing material is evaporated to coat the surface of a transparent substrate 21 with an ITO film, the gas atmosphere is composed of the one contg. gaseous xenon, gaseous krypton or the gaseous mixture thereof. The total content of xenon and krypton occupied in the gas atmosphere is preferably controlled to >=30 vol.%.