METHOD AND SYSTEM FOR FILM DEPOSITION BY NEGATIVE ION IRRADIATION AND MULTI-SOURCE EVAPORATION

摘要

PROBLEM TO BE SOLVED: To form, e.g. a functional film which is composed of multi-source elements and in which insulating materials are used as base materials of film by means of dynamic mixing treatment. SOLUTION: This film forming method is exerted by means of dynamic mixing treatment where the application of ion irradiation from an ion source to the surface of a sample substrate is carried out simultaneously with the evaporation of base materials of film onto the surface of the sample substrate in a vacuum vessel. The ions projected from the ion source are negative ions and the base materials of film are insulating materials, and a fine-particle- dispersed film in which fine particles are dispersed can be formed.