METHOD FOR TRANSPORTING SEMICONDUCTOR DEVICE AND METHOD FOR SELECTING TRANSPORTATION PATH OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress the generation of a subsequent fault in the transportation of a semiconductor device. SOLUTION: By this transporting method for the semiconductor, the semiconductor device is transported from a starting point to a destination by using the transportation path B1+B2 having the smallest cosmic-ray density between plural transportation paths A and B1+B2 from the starting point to the destination. This method has a stage for inputting the starting point and destination of the transportation of the semiconductor, a stage for calculating the transportation paths A and B1+B2 from the starting point to the destination, a stage for calculating the comic-ray density values in the transportation paths A and B1+B2, and a stage for selecting the transportation path having the smallest cosmic-ray density between the transportation paths A and B1+B2.