APPARATUS FOR TRANSFERRING WAFER

摘要

PURPOSE: An apparatus for transferring a wafer is provided to prevent the damage of a wafer by sensing the generation of an interlock when a wafer is contacted with a section of a blade. CONSTITUTION: A wafer pickup vacuum hole(11) is formed inside a blade(10) of a transfer robot. An interlock sense portion is formed on the blade(10). The interlock sense portion is formed with a lock sense vacuum hole(12), a tension plate(13), and a pressure gauge(20). The lock sense vacuum hole(12) is formed by an additional vacuum line. The tension plate(13) and the pressure gauge(14) are formed on a front end portion and a rear end portion of the lock sense vacuum hole(12). The pressure gauge(14) is used for checking a state of a vacuum pressure of the lock sense vacuum hole(12) and transferring a checked result to an additional controller.