发明名称 DEVICE AND METHOD FOR MEASURING THE MOTION, SHAPE, AND/OR DEFORMATION OF OBJECTS
摘要 The present invention relates to a device (4) comprising a speckle interferometer part and a microscope part, wherein the speckle interferometer part comprises one or more lasers (5), one or more beam splitters (3), and a piezo mirror (8), and the microscope part comprises at least one tube (2) and a lens (11) arranged at the lower end of the at least one tube (2), wherein at least one beam splitter (3) of the speckle interferometer part is partially or completely integrated in the at least one tube (2) of the microscope part in such a way that the reference beam (6-1) and the object beam (6-2) can be conducted through the lens (11) of the microscope part. The device according to the invention is substantially a microscope that comprises at least one optical component of a speckle interferometer in the tube of the microscope. A substantially more compact construction for speckle interferometer devices is thereby additionally effected, whereby said speckle interferometer devices can be operated even with diode lasers.
申请公布号 WO2010066751(A2) 申请公布日期 2010.06.17
申请号 WO2009EP66654 申请日期 2009.12.08
申请人 TECHNISCHE FACHHOCHSCHULE WILDAU;FOITZIK, ANDREAS 发明人 FOITZIK, ANDREAS
分类号 G02B21/00;G01B9/02;G01B11/16 主分类号 G02B21/00
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