| 摘要 |
PROBLEM TO BE SOLVED: To provide a superconductor thin film of copper oxide containing mercury, which is large in area, small out-of phase precipitation constituting the impurity, and of superior superconducting characteristics, and a thin film manufacturing device and a method which can mass-produce the thin films. SOLUTION: The thin film manufacturing device is provided with a pressure vessel 1 (pressurized atmosphere furnace), equipped with a port 11 for leading in gas atmosphere containing mercury in a furnace wall 3, and a mercury supply device 10 for generating a gas atmosphere which contains mercury and for controlling the pressure of gas atmosphere containing mercury, independently of the pressure vessel 1. The mercury supply device 10 bring the gas atmosphere containing mercury inside the pressure vessel 1 through the port 11. Further, a metal sealing gate valve 16 is provided between the pressure vessel 1 and the mercury supply device 10. |
