METHOD FOR REMOVING IMPURITY OF QUARTZ TUBE AND APPARATUS THEREOF

摘要

PURPOSE: A method for removing impurity of a quartz tube and an apparatus thereof are provided to reduce transmission loss of an optical fiber by removing a hydroxide radical included in a high purity quartz tube. CONSTITUTION: According to the apparatus for removing impurity of a quartz tube, a plasma generation apparatus(3) generates inductively coupled plasma. The plasma generation apparatus is installed in a heat shelf body(18). A head stock chuck(10) and a tail stock chuck(12) are connected to both ends of the heat shelf body. A quartz tube(14) is fixed between the head stock chuck and the tail stock chuck. And a heat shelf transportation apparatus(16) is installed between the heat shelf body and the plasma generation apparatus to move the plasma generation apparatus to the left and right.