| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor-cleaning method for contributing to the improvement in profitability resulting from saving usages of energy and a solvent and the improvement of safety and working environment at the same time, and to provide an apparatus to be used in this method. SOLUTION: This vapor-cleaning method comprises a step to generate cleaning vapor by vaporizing a cleaning liquid in a vapor generating tank 1, a step to vapor-clean the object to be cleaned by supplying the generated cleaning vapor to a cleaning tank 2 housing the object to be cleaned and a step to condense/cool the cleaning vapor used for cleaning in a condenser and return the condensed/cooled drain of the cleaning vapor to the tank 1. In the concrete, the cleaning vapor just after the object to be cleaned is cleaned in the tank 2 is condensed isothermally in the primary condenser 3 and the condensed drain is returned to the tank 1. The residual cleaning vapor which is not condensed in the condenser 3 is supercooled in the secondary condenser 5 and the supercooled drain is returned to the tank 1. COPYRIGHT: (C)2003,JPO
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