发明名称 Optical waveguide path, manufacturing method and coupling method of the same, and optical waveguide path coupling structure
摘要 An optical waveguide path coupling structure is realized without requiring highly accurate alignment.In an optical waveguide path coupling structure, a first optical waveguide path arranged on an optical device chip, which has a first cross section formed such that a core layer is exposed as an oblique plane with a slight angle theta of approximately 6 degrees, for example, at an end portion and a second cross section formed in an approximately vertical direction to the first cross section at a position apart from the first cross section by a predetermined distance, and a second optical waveguide path arranged on a base substrate, which has a first cross section formed such that the core layer is exposed as an oblique plane with a slight angle theta of approximately 6 degrees, for example, at an end portion and a second cross section formed in the approximately vertical direction to the first cross section at a position apart from the first cross section by a predetermined distance, are coupled by aligning the first cross sections and the second cross sections.
申请公布号 US6791675(B2) 申请公布日期 2004.09.14
申请号 US20010995616 申请日期 2001.11.29
申请人 NEC TOPPAN CIRCUIT SOLUTIONS, INC. 发明人 KIKUCHI HIDEO;ISHIDO KIMINORI
分类号 G02B6/122;G02B6/12;G02B6/125;G02B6/13;G02B6/42;H01L31/0232;H01L33/48;(IPC1-7):G01J5/56 主分类号 G02B6/122
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